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Magnet sensor cover (left-hand side and right-hand side)

IP.com Disclosure Number: IPCOM000004758D
Publication Date: 2001-May-01
Document File: 4 page(s) / 296K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a design for a magnet sensor cover (left-hand side and right-hand side). Benefits include prevention of breakage of a magnet sensor wire during chamber-cleaning cycles and maintenance.

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Magnet sensor cover (left-hand side and right-hand side)

Disclosed is a design for a magnet sensor cover (left-hand side and right-hand side). Benefits include prevention of breakage of a magnet sensor wire during chamber-cleaning cycles and maintenance.

The sensor cover is used on a semiconductor equipment fabrication etcher. The sensor cover is chromed 1/16-inch thick stainless steel. The cover has a window so that technicians can view the rotation of the magnets without having to take the cover off. The sensor cover is used on both chambers of the etcher so left-hand and right-hand sensor covers are required. These covers are the mirror image of each other (see Figure 1 through Figure 5).

The sensor cover is simple in design and is easily installed.

Fig. 1

Fig. 2

Fig. 3

Fig. 4

Fig. 5

Disclosed anonymously