Browse Prior Art Database

A THIN FILM RESISTOR NOISE SOURCE

IP.com Disclosure Number: IPCOM000005504D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2001-Oct-10
Document File: 1 page(s) / 63K

Publishing Venue

Motorola

Related People

David Hughes: AUTHOR [+3]

Abstract

This invention relates to a new method of fabricating semiconductor noise sources and, more par- ticularly, relates to a technique for manufacturing noise sources integrated with additional semicon- ductor circuitry.

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Volume 3 March 1983

A THIN FILM RESISTOR NOISE SOURCE

By David Hughes, John Price and Ray Roop

   This invention relates to a new method of fabricating semiconductor noise sources and, more par- ticularly, relates to a technique for manufacturing noise sources integrated with additional semicon- ductor circuitry.

   It has been customary to perform noise generation by using an avalanching junction. Such an ap- proach does not readily lend itself to integrated circuits because the processing appropriate to the re- mainder of the circuit does not produce adequately noisy junctions.

   An object of the present invention is to provide a noise source which can be co-fabricated with con- ventional semiconductor circuitry without compromising either segment of the enterprise. The present invention is embodied in a noise generator formed at the oxidized interface between a resistive film and a metallic contact constructed as discussed below.

   The invention will be illustrated by the accompanying drawing in which a semiconducting substrate (1) is covered by an epitaxial layer (2), and a dielectric film (3) prior to the evaportion of a chromium-silicon composite layer. The chromium-silicon composite film or layer is patterned into a resistor (4). The surface of the chromium-silicon layer is slightly oxidized. Metallic contacts (5) are ap- pended to the ends of the chromium-silicon resistor without removing the slight oxidation. Aluminum

Is a suitable material for the metal contacts...