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Method for an angled blade trench in a scribe to stop crack propagation from saw kerf

IP.com Disclosure Number: IPCOM000005650D
Publication Date: 2001-Oct-23
Document File: 2 page(s) / 34K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for an angled blade trench in a scribe to stop crack propagation from saw kerf. Benefits include improved saw quality and improved copper cut quality.

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Method for an angled blade trench in a scribe to stop crack propagation from saw kerf

Disclosed is a method for an angled blade trench in a scribe to stop crack propagation from saw kerf. Benefits include improved saw quality and improved copper cut quality.

Background

              Cutting Copper devices with low mechanical adhesion layers results in delamination of the device due to blade loading with ductile copper at the contact surface.

              Conventional dicing processes use straight blades with varying angled tips producing a contact angle of less than or equal to 90 degrees. These blades are used on a spindle to place cuts partially into the wafer for stress relief or completely through the wafer for die separation.

Description

              The disclosed method includes the use of a low-angled blade to cut a trench into a scribe using the same spindle as the separation blades.

              On a dual-spindle saw, the angled blades concept can best be applied by placing two angled blades, facing opposite directions on the first spindle (see Figure 1). These blades cut the trench in the scribe (see Figure 2). The second spindle has a single blade that separates the devices. An alternative approach using three blades on the first spindle can be used in cases where the first spindle is currently used with a different blade in a series configuration. In this application, the first spindle would have the existing blade between the two angled blades . Hubless blades may be required to enable two or three blades on the s...