Browse Prior Art Database

- SEZ ETCH MODIFICATION

IP.com Disclosure Number: IPCOM000006019D
Original Publication Date: 2001-Nov-26
Included in the Prior Art Database: 2001-Nov-26
Document File: 3 page(s) / 34K

Publishing Venue

Motorola

Related People

John Vint: AUTHOR

Abstract

- SEZ ETCH MODIFICATION

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1           TITLE -  SEZ ETCH MODIFICATION

By John Vint

2           PROBLEM SOLVED

THIS IDEA REDUCES THE SCRAP LEVELS ON THE WAFER TRANSPORT MECHANISM OF A SEZ ETCHER 100 AND 101 MODELS.

3           SUMMARY

THE INVENTION CONSISTS OF TWO SOLID BLOCKS OF TEFLON MATERIAL  MEASURING

40 MM BY 30 MM AND 25 MM IN HEIGHT. EACH BLOCK HAS A TRUMPET SHAPED ENTRANCE MACHINE MILLED AT THE FRONT WHICH TAPERS INTO A 2MM SLOT RUNNING THE FULL LENGTH OF THE BLOCK (SEE END VIEW) . EACH BLOCK HAS TWO OFF 4.5 MM LOCATING HOLES ( SEE PLAN VIEW.)

4           PROBLEM SOLUTION

THE DESIGN OF THE BLOCKS WOULD ALLOW THE WARPED WAFERS TO ENTER THE WIDEST PART OF THE TRUMPET SHAPED SLOTS (SEE END VIEW) WHEN BEING UNLOADED FROM THE MACHINE BY THE UNLOAD PICK ARM , AND AS THE WARPED WAFERS TRAVELLED THROUGH THE TRUMPET SHAPED SLOTS THEY WOULD BE FLATTENED OUT DUE TO THE TAPER DESIGN OF THE SLOTS, THEREFORE REDUCING THE WARPAGE TEMPORARILY AND ALLOWING THE WAFERS TO BE PRESENTED INTO THE CENTRE OF THE UNLOADING  JIG WITHOUT ANY INTERVENTIONS.

FIGURES 1,2 AND 3 SHOW THE ADDITIONAL BLOCKS TO FACILITATE WAFER TRANSPORT

Figure 1 – left view

Figure 2 – right view

Figure 3 – plan view

5           SPECIFIC CHANGE TO EQUIPMENT

THE CHANGE MADE TO THE EQUIPMENT WAS AS FOLLOWS

TWO TEFLON BLOCKS WERE

MACHINE SURFACE

 

BLOCKS

 

   CAP SCREW

 

 LOCATED ON THE TOP SURFACE OF THE SEZ ETCHER MACHINE AND WERE EACH LOCATED BY TWO 3MM CAP SCREWS.

THE LOCATION OF THE BLOCKS IN RELATION TO THE UNLOADER JIG WAS 5 MM ( SEE FIGURE 4)

FIGURE 4

FIGURE 5 – UNLOAD JIG POSITION

6            APPLICATION TO OT...