Browse Prior Art Database

ENDCAP FOR DIFFUSION FURNACE

IP.com Disclosure Number: IPCOM000006060D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Nov-29
Document File: 1 page(s) / 41K

Publishing Venue

Motorola

Related People

Steve Handy: AUTHOR [+3]

Abstract

Endcaps are commonly used in diffusion furnaces to enhance profiling and back pressure capabilities. Prior art endcaps commonly include a plurality of quartz plates arranged in a tiered formation and connected by quartz rods. A handle is attached io the top quartz plate. When inserting this prior art endcap into the diffusion furnace, the endcap must be perfectly aligned or the blunt edges of the quartz plates hit the sides of the diffusion furnace and often break.

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MOTOROLA INC. Technical Developments Volume 12 April 1991

ENDCAP FOR DIFFUSION FURNACE

by Steve Handy, Larry Fuller and Ramon Cota

  Endcaps are commonly used in diffusion furnaces to enhance profiling and back pressure capabilities. Prior art endcaps commonly include a plurality of quartz plates arranged in a tiered formation and connected by quartz rods. A handle is attached io the top quartz plate. When inserting this prior art endcap into the diffusion furnace, the endcap must be perfectly aligned or the blunt edges of the quartz plates hit the sides of the diffusion furnace and often break.

  A new and improved endcap (10) includes a plurality of quartz plates' (12) wherein all but the top plate (12A) are enclosed in a quartz tube (14) having a rounded end (16). The quartz tube (14) extends from a first surface (18) of the top quartz plate (12A) and the second surface (20) of the top plate (12A) has a handle (22) attached thereto. The uniform configuration, rounded end and smooth outside diameter of the quartz tube (14) allows for reduced breakage and easy insertion of the endcap (10) into a diffusion furnace.

28 0 MOfOmla, Inc. ,991

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