Browse Prior Art Database

VIEWPORT HEATER CHAMBER

IP.com Disclosure Number: IPCOM000006068D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Nov-29
Document File: 1 page(s) / 46K

Publishing Venue

Motorola

Related People

Gordon Grivna: AUTHOR [+2]

Abstract

During the processing of materials inside vacuum chambers, the reacting or evaporating species/gases tend to accumulate on reactor walls. To limit this buildup and for tighter process control, reactor walls are usually heated. The warm chamber walls reduce the sticking coefficient of the condensates and reduce the buildup on the chamber walls. Viewports or other non-thermally conductive parts of the chamber wall buildup condensates at a faster rate than the heated section of the chamber. This is especially a problem in areas where high vacuum applications do not allow cleaning of the viewport and the interior and exterior of the viewport is at a reduced temperature in comparison to the reaction by-products. To reduce this buildup a Viewport Heater Chamber was developed.

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MOTOROLA INC. Technical Developments Volume 12 April 1991

VIEWPORT HEATER CHAMBER

by Gordon Grivna and Howard Kirshler

  During the processing of materials inside vacuum chambers, the reacting or evaporating species/gases tend to accumulate on reactor walls. To limit this buildup and for tighter process control, reactor walls are usually heated. The warm chamber walls reduce the sticking coefficient of the condensates and reduce the buildup on the chamber walls. Viewports or other non-thermally conductive parts of the chamber wall buildup condensates at a faster rate than the heated section of the chamber. This is especially a problem in areas where high vacuum applications do not allow cleaning of the viewport and the interior and exterior of the viewport is at a reduced temperature in comparison to the reaction by-products. To reduce this buildup a Viewport Heater Chamber was developed.

  The Viewport Heater Chamber was specifically designed for use on an Applied Materials 8330 reactive ion etch system. It consists of a housing with an auxiliary viewport that fits over the existing viewport on the system. The "housing" has a hot gas inlet and outlet designed to allow a flow of heated gas to heat the viewport window thereby reducing condensates. Nitrogen is an acceptable and available gas.

  The concept of the Viewport Heater Chamber has a wide range of other applications, wherever the buildup of condensates is desired to be minimized.

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