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WALKING BEAM DUAL SIZE BOAT HOLDER

IP.com Disclosure Number: IPCOM000006084D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Dec-03
Document File: 2 page(s) / 70K

Publishing Venue

Motorola

Related People

Terry Dunn: AUTHOR [+2]

Abstract

MOS 5 started up in 1978 as a 4 inch wafer fab area. The fluorocarbon 4002 "walking beam" acid processors purchased at start up were capable of running two 4 inch cassettes or one 5 inch cassette (see addendum). In 1989 MOS 5 began converting its production capability to 5 inch wafers. Production requested that the "walking beam" hoods be able to run two 5 inch cassettes so that no capacity was lost by the conversion.

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MOTOROLA INC. Technical Developments Volume 12 April 1991

WALKING BEAM DUAL SIZE BOAT HOLDER

by Terry Dunn and William Wise

  MOS 5 started up in 1978 as a 4 inch wafer fab area. The fluorocarbon 4002 "walking beam" acid processors purchased at start up were capable of running two 4 inch cassettes or one 5 inch cassette (see addendum). In 1989 MOS 5 began converting its production capability to 5 inch wafers. Production requested that the "walking beam" hoods be able to run two 5 inch cassettes so that no capacity was lost by the conversion.

  The fluorocarbon wafer boat or cassette holder design would not allow sufficient room for reliable transfer operations with two 5 inch cassettes from tank to tank. The new cassette holder designed by Terry Dunn and Bill Wise allowed one holder to utilize two 4 inch cassettes or two 5 inch cassettes and could also allow one 4 inch cassette and one 5 inch cassette to be run simultaneously. This helped production during the transition period of running both 4 inch and 5 inch material in the area and simplified tooling requirements.

PROBLEM

1. Conversion of seven walking beam hoods to 5" wafer size without loss of capacity.

  a. Original walking beam holder capable of holding two 4" cassettes. If holder scaled up for 5" insufficient room for two cassettes.

b. If scaled 5" holder would have worked then two sets of holders required for every hood.

SOLUTION

  The design of a single holder to accommodate two 4" cassettes or two 5" cass...