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AN IMPROVED ROLLER FOR THE SILICON VALLEY GROUP DOUBLE SIDED SILICON WAFER SCRUBBER

IP.com Disclosure Number: IPCOM000006098D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2001-Dec-04
Document File: 1 page(s) / 60K

Publishing Venue

Motorola

Related People

Josephine Harbarger: AUTHOR [+2]

Abstract

The Silicon Valley Group Scrubber contains two cylindrical revolving rollers: one with a bristle brush and the other with an adhesive backed strip of Rode1 205 Polish Pad material (0.625" wide) spirally attached, from end to end. The wafer to he cleaned is fed horizontally between the rollers while the deionized water and ammonia are dispensed to the roller and onto the pad. The strips or pads have to be replaced periodically. During the replacement procedure the following problems were noticed.

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MOZOROLA INC. Technical Developments Volume 12 April 1991

AN IMPROVED ROLLER FOR THE SILICON VALLEY GROUP DOUBLE SIDED SILICON WAFER SCRUBBER

by Josephine Harbarger and Frank Patrick

THE PROBLEM

   The Silicon Valley Group Scrubber contains two cylindrical revolving rollers: one with a bristle brush and the other with an adhesive backed strip of Rode1 205 Polish Pad material (0.625" wide) spirally attached, from end to end. The wafer to he cleaned is fed horizontally between the rollers while the deionized water and ammonia are dispensed to the roller and onto the pad. The strips or pads have to be replaced periodically. During the replacement procedure the following problems were noticed.

   1. The strip covered the feed holes for the water and ammonia, thereby restricting the flow of the fluids.

  2. The ends of the strip lifted in the area of the roller which does not contact the wafer. This resulted in broken wafers and/or contamination of the brush and wafer.

  3. Since there was no pattern or guide for installing the strip, it was a difficult and time consuming operation. A technician's time was usually required.

4. The strips required frequent change, i.e. every

8 to 24 hours.

.015" DEEP

THE SOLUTION

  The solution found was to machine each roller with a shallow spiral groove 0.015 inches deep, with the proper pitch and width to guide the pad or strip behveen the feed holes. A slot was machined at each end to retain the ends of the strip (see below). The operator...