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Method for a substrate-out-of-pocket laser jig

IP.com Disclosure Number: IPCOM000006267D
Publication Date: 2001-Dec-19
Document File: 4 page(s) / 504K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a substrate-out-of-pocket laser jig. Benefits include improved reliability and repeatability of test results, improved ease of handling during the test, and improved testing efficiency.

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Method for a substrate-out-of-pocket laser jig

Disclosed is a method for a substrate-out-of-pocket laser jig. Benefits include improved reliability and repeatability of test results, improved ease of handling during the test, and improved testing efficiency.

General description

              The disclosed method is a jig for use during laser measurement capability analysis (MCA). The laser is attached to an automatic package loader (APL) that loads the substrates into carriers. The substrates are shipped in plastic trays and must be loaded into carriers for processing. The laser detects a substrate-out-of-pocket (SOOP) condition. A substrate is out of the pocket when it does not seat properly in the carrier, which may cause incorrect processing at downstream modules. The jig is used for the repeatability and reproducibility experiments of the measurement capability analysis.

              The jig resembles a carrier with substrates in tact but is one solid piece of material. The substrates in this jig are protrusions above the surface of the carrier. The jig’s dimensions and appearance are such that the machine recognizes it as a normal carrier. The laser scans the jig and measures the substrate height. This measurement is used for repeatability and reproducibility experiments.

              A loaded carrier with substrates is required for an MCA to be performed on an automatic package loader. It must be kept in its exact state for the duration of the MCA. The disclosed method simulates a loaded carrier with substrates and ensures repeatability and reproducibility.

              The conventional solution is to use a loaded carrier with substrates that has the substrates glued in place. The glued substrates are meant to remain in their exact positions. Extreme care is needed when handling this carrier to avoid moving the substrates or popping them out of the pockets.

Advantages

              The disclosed method simulates a loaded carrier with substrates and guarantees the result is the same when tested repeatedly. The conventional solution does not guarantee that the substrates remain in the pockets or in their exact positions during the duration of the experiment. Less care is required during handling the disclosed method. The experiments are less likely to have to be repeated with the disclosed method. Set-up time is saved be...