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Method of magnetostatic filtration and trapping for electroless Co baths

IP.com Disclosure Number: IPCOM000006503D
Publication Date: 2002-Jan-09
Document File: 3 page(s) / 1K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method of magnetostatic filtration and trapping for electroless Co baths. Benefits include the trapping of precipitated metals within the plating cell and ease of filtering and flushing the ferromagnetic materials

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Method of magnetostatic filtration and trapping for electroless Co baths

Disclosed is a method of magnetostatic filtration and trapping for electroless Co baths. Benefits include the trapping of precipitated metals within the plating cell and ease of filtering and flushing the ferromagnetic materials.

Description

              The disclosed method specifically applies to the electroless deposition of ferromagnetic materials, specifically  CoP, CoB, CoBP, CoWP, CoWPB, CoReP, CoNiP, and other doped Co compounds. However, this method also applies to the electroless deposition of any ferromagnetic material.

              In the process of electroless plating, decomposition of the plating bath is not unusual. When this occurs, it can result in precipitated metal being carried with the bath through any plumbing. The metal can eventually reach the surface of the substrate to be plated (8” or 12” wafers). When this occurs, defects result. In addition, precipitated metal serves as a catalyst for further deposition. That is, when the material is in the bath, further decomposition is encouraged by its very presence.

              The disclosed method enables filtering of ferromagnetic materials from electroless plating baths. Electromagnets or permanent magnets trap solid CoP, CoWP, CoReP, or CoNiP onto plating cell walls. Electromagnets or permanent magnets encased in inert material (such as Teflon, CPVC, or ceramic) trap solid CoP within the plumbing that feeds plating solution to the plating cell. This device is intended to be contained within a removable fixture to allow for easy replacement. Electromagnets or permanent magnets fabricated as a mesh, showerhead, diffuser which are coated with polymer material (such as Teflon, PE, and PVDF...