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Method for a premount pellicle inspection using reticle soft-defect inspection tools with applicability to a removable pellicle developed for 157-nm and EUV technology

IP.com Disclosure Number: IPCOM000006505D
Publication Date: 2002-Jan-09
Document File: 4 page(s) / 57K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a fixture design for premount pellicle inspection using reticle soft-defect inspection tools with applicability to removable pellicle developed for 157-nm and EUV technology. Benefits include accurate and objective size and location of the particle/defect on the pellicle and the use of a reticle inspection tool to inspect pellicles

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Method for a premount pellicle inspection using reticle soft-defect inspection tools with applicability to a removable pellicle developed for 157-nm and EUV technology

Disclosed is a method for a fixture design for premount pellicle inspection using reticle soft-defect inspection tools with applicability to removable pellicle developed for 157-nm and EUV technology. Benefits include accurate and objective size and location of the particle/defect on the pellicle and the use of a reticle inspection tool to inspect pellicles.

Description

              The disclosed method addresses the problem of determining the size and location of particle or soft defect found on a pellicle before mount. This capability is required for inspecting for particle contamination on removable pellicles for 157-nm and EUV technologies.

      The conventional solution for pellicle inspection is visual observation using high intensity light. This approach does not enable accurate and objective measurement of the size and location of the particle within the pellicle.

      The disclosed reticle inspection tool detects particles on the glass side level without having to focus on some objects on the surface.

Advantages

The disclosed method provides the following advantages:

•             Accurate and objective size and location of the particle/defect on the pellicle

•             Use of a reticle inspection tool to inspect pellicles

Detailed Description

              The disclosed method includes a design for a reticle inspection tool fixture. The side view (see Figur...