Browse Prior Art Database

INSITU-RESISTANCE HEATED PLASMA BOAT

IP.com Disclosure Number: IPCOM000006565D
Original Publication Date: 1992-Aug-01
Included in the Prior Art Database: 2002-Jan-15
Document File: 4 page(s) / 126K

Publishing Venue

Motorola

Related People

John Steele: AUTHOR

Abstract

This invention modiiies an ASM plasma plate boat standard ASM heating element/plasma system has a in such a way, that the wafer substrates can be heated to maximum temperature of 450°C. This modified Plasma temperature beyond the capability of the standard tube Boat, will be able to achieve up to 800°C (Maximum heating element. This elevated temperature is required temperature before N2 carrier gas will start nitridiig the where deposition stoichiometry of the films require high graphite plates). The standard graphite boat, manufac- atomic mobility ("Poly and/or Epitaxy" depositions). The tured by "ELECTROGRAPH" is shown in Figure 1.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 50% of the total text.

Page 1 of 4

MOTOROLA INC. Technical Developments Volume 16 August 1992

INSITU-RESISTANCE HEATED PLASMA BOAT

by John Steele

  This invention modiiies an ASM plasma plate boat standard ASM heating element/plasma system has a in such a way, that the wafer substrates can be heated to maximum temperature of 450°C. This modified Plasma temperature beyond the capability of the standard tube Boat, will be able to achieve up to 800°C (Maximum heating element. This elevated temperature is required temperature before N2 carrier gas will start nitridiig the where deposition stoichiometry of the films require high graphite plates). The standard graphite boat, manufac- atomic mobility ("Poly and/or Epitaxy" depositions). The tured by "ELECTROGRAPH" is shown in Figure 1.

   Figure1 Standard ASM ELECTROGRAPH

PLATE BOAT

GAS OUTLET

END

ELECTRODES

HANGERS

.

0 Motorola. Inc. 1992 133

[This page contains 15 pictures or other non-text objects]

Page 2 of 4

0 M

MOTOROLA INC. Technical Developments Volume 16 August 1962

The Anode and Cathode electrodes make contact via the fnconel "pedestals" at the front end of the boat. Figure 2 shows the standard ASM tube configuration.

I%"" L ASS SI.nd.rd C0",~"ru!.?"
T.WW*tL!IO bLm"p 0" R.dW.h h..Ud
.ndc.p .ndmg.n c-ring ,..I_ CYrn", .ynms cm h."dl. 400 c

ou.m a*,,
.loinvo*.fn~ GU MI.,

Sours. 0' k",. "dhnt
."dllpta'~pLyh.f

Figure 3 shows the modifications that would be necessary to retrofit an existing system so that 800 "C could be achieved.

~~-tJv iluhW* hM nib n- CDolhg

mwadoc.-tJ*

11o.mo

CDIlinp

S3C.S

Figure 4 shows a side view of the standard plasma...