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Tool for Accurately Checking Belt Tension on Sputtering Machines

IP.com Disclosure Number: IPCOM000006594D
Publication Date: 2002-Jan-16
Document File: 2 page(s) / 25K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a tool for checking the belt tension of lift mechanisms for certain metal-sputtering machines. The disclosed tool (shown in FIG. 1 and FIG. 2) is manually placed against the drive belt of the lift mechanism of a sputtering machines process chamber. The disclosed tool then provides an accurate, precise method for determining both insertion force and belt tension.

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Tool for Accurately Checking Belt Tension on Sputtering Machines

Disclosed is a tool for checking the belt tension of lift mechanisms for certain metal-sputtering machines.  The disclosed tool (shown in FIG. 1 and FIG. 2) is manually placed against the drive belt of the lift mechanism of a sputtering machine’s process chamber.  The disclosed tool then provides an accurate, precise method for determining both insertion force and belt tension.

Traditionally, wafer manufacturers and other users of sputtering machines check belt tension by subjective, mechanically crude methods.  These methods include:

•   Using the fingers to pinch the belts.

•   Using the fingers to pull on the belts.

•   Using a ruler to push on the belts.

With certain metal-sputtering machines, a 0.25-inch deflection of the belt for the lift-mechanism indicates that the belt needed to be tightened or adjusted.  However, with traditional methods of determining belt tension, the force exerted on the drive belts of lift mechanisms cannot be accurate or precisely gauged.  With traditional methods, it is not uncommon for belts to be over-tightened.  Over-tightening of the drive belts causes excessive lateral stress on the drive motor and lift-bearing assemblies of sputtering machines.  When drive belts are over-tightened, the sputtering machines eventually fail or break.

The disclosed tool solves the problem of inaccurate, subjective checks on belt tension.  The disclosed tool precisely aligns to the drive belt and lift weldme...