Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Method for an AF plasma beam mold die cleaner

IP.com Disclosure Number: IPCOM000006611D
Publication Date: 2002-Jan-16
Document File: 2 page(s) / 37K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for an AF plasma beam mold die cleaner. Benefits include improved process quality and efficiency.

This text was extracted from a Microsoft Word document.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 98% of the total text.

Method for an AF plasma beam mold die cleaner

Disclosed is a method for an AF plasma beam mold die cleaner. Benefits include improved process quality and efficiency.

Background

              The conventional mold cleaning procedure uses melamine or rubber-based cleaning compounds in combination with a mold release or conditioning compound. Extra substrates or dummy strips may be used as part of this process.

Description

              The disclosed method uses a plasma discharge beam to clean mold die. Components of the method include (see Figure 1):

•             Upper-mask plate

•             Grid block

•             Ground plate

•             Plasma generating source

              Plasma discharge beams are focused and accelerated onto a target die surface using a guide mask attached to the power electrode. The grid blocks are connected to a bias voltage and positioned between the upper mask and target die surface. These blocks accelerate the flow of ionized gas towards the target. The upper-mask windows are adjustable and replaceable. They enable the use of different patterns to accommodate the geometry of the target object.

Advantages  

              The disclosed method provides several advantages over the conventional method, including:

•             Improved process quality because of the use of adjustable, replaceable upper-mask              windows

•             Improved process efficiency because of the use of plasma discharge beams and                     acceleration of the gas flow

Power electrode  ( + + )

Plasma beam accelerator

Grd/Power

Electrode

Mold die

Plasma chamber

Mask  Plate

Insulation foil

Plasma Clouds

Plasma  be...