Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

MINIATURE AUGER SAMPLE PROBE MANIPULATOR

IP.com Disclosure Number: IPCOM000007066D
Original Publication Date: 1993-Oct-01
Included in the Prior Art Database: 2002-Feb-22
Document File: 2 page(s) / 121K

Publishing Venue

Motorola

Related People

Bridget Rogers: AUTHOR [+3]

Abstract

Auger electron spectroscopy (AES) is a surface analysis technique. To perform AES a solid sample is placed in an ultra-high vacuum (UHV) chamber (Z 10-9 torr), irradiated with an electron beam and the emitted electrons are collected and counted as a function of energy, One type of emitted electron is the Auger electron which is emitted at an energy characteristic ofthe atom from which it was emitted.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 54% of the total text.

Page 1 of 2

MOTOROLA INC. Technical Developments Volume 20 October 1993

MINIATURE AUGER SAMPLE PROBE MANIPULATOR

by Bridget Rogers, Darryl Burns and James LaCroix

  Auger electron spectroscopy (AES) is a surface analysis technique. To perform AES a solid sample is placed in an ultra-high vacuum (UHV) chamber (Z 10-9 torr), irradiated with an electron beam and the emitted electrons are collected and counted as a function of energy, One type of emitted electron is the Auger electron which is emitted at an energy characteristic ofthe atom from which it was emitted.

  AES analysis of insulating samples is difficult, however, because of charge build-up due to the irradiating electron beam. The charge build-up changes the energy of a sample's surface and the energies of the emitted electrons. For the same rea- son, AES analysis of conducting and semiconduct- ing layers on top of insulating layers is also difficult, unless there is a conductive path horn the conducting or semiconducting layer to ground.

  Conventional techniques to create this conduc- tive path have involved using conducting paste, such as carbon or silver pastes. However, these pastes tend

"

to outgas under UHV conditions which can con- taminate the vacuum system. Also, contacting small geometries with these pastes is very difficult. The paste can wick up and over analysis areas, thereby destroying the sample.

  A miniature probe manipulator was developed to eliminate the need for conducting pastes to bleed off charge fro...