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Browse Prior Art Database

RETRACTABLE VACUUM WAND ASSEMBLY

IP.com Disclosure Number: IPCOM000007089D
Original Publication Date: 1994-Feb-01
Included in the Prior Art Database: 2002-Feb-25
Document File: 1 page(s) / 40K

Publishing Venue

Motorola

Related People

J. A. Harbarger: AUTHOR [+3]

Abstract

The Retractable Wand is for wafer recovery or wafer placement. This new type of wand will elimi- nate any pick and place marks that are currently induced from existing wands. It will improve the quality by eliminating reject wand marks on the backs of wafers.

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MOlOROLA Technical Developments Volume 21 February 1994

RETRACTABLE VACUUM WAND ASSEMBLY

by J. A. Harbarger, C. Dancil, and K. O'Conner,

  The Retractable Wand is for wafer recovery or wafer placement. This new type of wand will elimi- nate any pick and place marks that are currently induced from existing wands. It will improve the quality by eliminating reject wand marks on the backs of wafers.

  The Retractable Wand has tubing that is housed inside a reel. This allows the operator to pull out the desired length that is needed. When this is reached, the reel will automatically lock. On com- pletion of use, the wand is pulled to release the

locking mechanism and recoils back inside the hous- ing. The reel is fixed on an eyelet hook which is located in the top rear portion of a clean air hood. This location allows the!wand to stay clean and be moved freely inside the work station.

  The Retractable Wand assembly allows the work area to be free of tubing that can catch on wafers and glassware' and cause breakage and contamina- tion. Visual rejects are eliminated due to the fact that the wand stays clean.

30 0 MOtOrola, 1°C. 1994

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