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Browse Prior Art Database

NEW PYROGENIC OXIDATION INJECTOR DESIGN

IP.com Disclosure Number: IPCOM000007213D
Original Publication Date: 1994-Jun-01
Included in the Prior Art Database: 2002-Mar-05
Document File: 3 page(s) / 89K

Publishing Venue

Motorola

Related People

Emmett Howard: AUTHOR [+2]

Abstract

The combining ofthe chamber injector port and the oxygen inlet tube in a Horizontal Hotwall Pyro- genie Reactor eliminates an area where particulate material can accumulate.

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MO'ICOROLA Technical Developments Volume 22 June 1994

NEW PYROGENIC OXIDATION INJECTOR DESIGN

by Emmett Howard and Tim Warfield

  The combining ofthe chamber injector port and the oxygen inlet tube in a Horizontal Hotwall Pyro- genie Reactor eliminates an area where particulate material can accumulate.

  Sutlicient recombination occurs in this dead space to allow the particulate material to reach a size that leads to direct failure of integrated circuits being processed in the reaction chamber. The source of this particulate material is the devitrification of the injector and surrounding reaction chamber which are quartz.

  The devitrification is brought on by stress. The stress is present due to temperature gradients from the uneven heating ofthe chamber and injector. This localized heating is due to the combustion ofHydro- gen, impact of the gas flow stream onto the quartz

ware, and portions ofthe reaction chamber and injec- tor being exposed to room temperatures at the heater element to chamber interface.

  Each time the torch (H2/02) is ignited turbu- lent flows result From the shock wave produced by the violent reaction at ignition. This allows small particles to be mixed together where they loosely combine to form larger particles. Each time the torch is ignited particulate material is distributed through- out the chamber.

  When particulates of significant size make con- tact with the wafer they can block conducting paths or alter circuit performance which is a fail...