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A method for wafer calibration performed in a stepper and coat/developer track linked interface.

IP.com Disclosure Number: IPCOM000007311D
Publication Date: 2002-Mar-13
Document File: 4 page(s) / 81K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for wafer calibration performed in a stepper and coat/developer track linked interface using a newly developed alignment fixture. Benefits include improved performance, reduced defects, and reduced product loss.

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A method for wafer calibration performed in a stepper and coat/developer track linked interface.

Disclosed is a method for wafer calibration performed in a stepper and coat/developer track linked interface using a newly developed alignment fixture. Benefits include improved performance, reduced defects, and reduced product loss.

Background

              Wafer mishandling can occur between a stepper and a coat/developer track. Poor handling causes wafer scrap, misalignment, and significant down time on photolithography equipment. Conventionally, the problem is solved by calibrating the wafer loader robot arm by eye and fine-tuning the arm position by trial and error.

General description

              The disclosed method is an alignment fixture used to calibrate a wafer loader robot arm to a coat developer track linked interface stage. Calibration prevents wafer misalignment, registration, and poor overall wafer handling, which can cause wafer scrap or die loss. The fixture is used on production equipment within the photolithography process of semiconductor manufacturing.

              The key elements of the method include:

•             Accuracy of the wafer loader robot arm calibration

•             Flexibility of use with both left and right hand equipment configurations

•             Photolithography equipment in either left- or right-hand configurations

•             Fixture designed to be compatible with either layout

•             Simplistic setup, use, and procedures

Advantages

              The technical advantages of the disclosed method include:

•             Accuracy–The fixture is much more accurate. The fixture contains a scale to allow for            alignment of the robot arm to within 1-mm in both X and Y coordinates. The marks al...