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PSMLint - Phase Shifting Mask Physical Verification Level Type Checking

IP.com Disclosure Number: IPCOM000007351D
Publication Date: 2002-Mar-18
Document File: 9 page(s) / 46K

Publishing Venue

The IP.com Prior Art Database

Abstract

A phase shifting mask type checking approach, PSMlint, is described. The approach can be integrated into physical verification and related tools and processes to provide early assessment and resolution of phase shifting problems. This helps facilitate so called phase compliant designs. The type checking can include both shape/geometry checking as well as coloring checking.

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Slide 1 of 9

PSMlint

Abstract: A phase shifting mask type checking approach, PSMlint, is described. The approach can be integrated into physical verification and related tools and processes to provide early assessment and resolution of phase shifting problems. This helps facilitate so called "phase compliant" designs. The type checking can include both shape/geometry checking as well as coloring checking.


Slide 2 of 9

Background

 

Design

Mask/Process

Libraries

Physical Design

Physical

Verification

CATS

   
   

GDSII

OPC/PSM

 

Logic Synthesis

 

Mask Writing

Today, phase conflict detection is done at the mask creation step

If phase conflicts are found, the resolution requirements are passed on to earlier design steps

This process is expensive

  Time consuming

  Out of the ordinary


Slide 3 of 9

Improvements

Performing the phase conflict checks at the physical verification stage will cut the loop across mask & design

But ....

  Still need to do shifter placement and phase assignment, both of which are expensive operations


Slide 4 of 9

Solution

PSMlint allows the user (at the physical verification stage) to perform the phase conflict requirement checks in a more rapid fashion

  10x faster

  In tests, PSMlint has detected 100% of standard errors normally caught during actual shifter placement and phase assignment (for certain categories of errors)

However, PSMlint is not a substitute for the actual shifter placement and phase assignment


Slide 5 of 9

PSMlint

Checks for errors in to two main categories:

  Sh...