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Browse Prior Art Database

METHOD FOR FABRICATING MICROMECHANICAL VELCRO

IP.com Disclosure Number: IPCOM000007389D
Original Publication Date: 1995-Mar-01
Included in the Prior Art Database: 2002-Mar-21
Document File: 3 page(s) / 135K

Publishing Venue

Motorola

Related People

Jon T Fitch: AUTHOR [+3]

Abstract

There are a wide range of permanent mechani- cal attachment methods available, but very few meth- ods which are truly temporary and removable. One practical solution to this problem is a plastic mate- rial called Velcro. However, the common type of Velcro is not suitable for mating micromechanical structures, nor is it suitable as a potential electrical interconnect between integrated circuits.

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MOTOROLA Technical Developments Volume 24 March 1995

METHOD FOR FABRICATING MICROMECHANICAL VELCRO

by Jon T Fitch, Kim Reid and T F? Ong

attachment uses the faceted silicon pillars described above to pierce a metal membrane. Alternatively, the metal membrane could be cut into a number of flexible segments (see Figure 4). These segments

would flex out of the way allowing the faceted sili- con pillar or lollipop shaped pillar to penetrate. Once the pillar had penetrated, the segments would flex back into place trapping the pillar. This method of attachment should be removable. Note that it is important that the hole in the center of the mem- brane be of an equal or smaller diameter than the shank of the silicon pillar. Both the piercing and segmented types of bond could be made more per- manent by eutectic or silicide reaction bonding of the two parts.

INTRODUCTION

  There are a wide range of permanent mechani- cal attachment methods available, but very few meth- ods which are truly temporary and removable. One practical solution to this problem is a plastic mate- rial called Velcro. However, the common type of Velcro is not suitable for mating micromechanical structures, nor is it suitable as a potential electrical interconnect between integrated circuits.

  A type of micromechanical Velcro has recently been fabricated by Han et. al. [l]. Since it is not removable, i.e. forms a permanent bond, Han's type of Velcro is not suitable for all applications. Also, Velcro is distinguished from other methods of mechanical attachment by the fact that it is removable.

ADVANTAGES AND UNIQUENESS

This micromechanical attachment system pro- posed has the following unique attributes:

INVENTION AND PROBLEM SOLUTION

Conventional semiconductor fabrication techniques are used.

This invention is a micromechanical method of

removable attachment which is much more like the Velcro used in clothing than the structure Han fab- ricated. In this invention two different types of mat- ing surfaces are formed one surface is comprised of metal loops formed by filling a cavity in a sacrificial material, the other surface is comprised of polysilicon "lollipops" formed by selective silicon growth on etched polysilicon pillars (see Figures 1 and 2). When the two surfaces mate, the round top of the "lolli-...