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Browse Prior Art Database

INDUCTANCE MEASUREMENT BY PULSED E-BEAM

IP.com Disclosure Number: IPCOM000007462D
Original Publication Date: 1995-Jul-01
Included in the Prior Art Database: 2002-Mar-28
Document File: 2 page(s) / 84K

Publishing Venue

Motorola

Related People

Vutaka Doi: AUTHOR

Abstract

It has been discovered that an addition of both E-beam gate and pulsed current probe to an E-beam equipment enables the time-domain, non-invasive inductance measurement of a lead. The pulse-mode inductance measurement is the only method for obtaining the inductance which is valid for estimat- ing the SSN (simultaneous switching noise) and the ground bounce for the high-speed digital electronics.

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MolylRoLA Technical Developments

8

INDUCTANCE MEASUREMENT BY PULSED 'E-BEAM

by Vutaka Doi

  It has been discovered that an addition of both E-beam gate and pulsed current probe to an E-beam equipment enables the time-domain, non-invasive inductance measurement of a lead. The pulse-mode inductance measurement is the only method for obtaining the inductance which is valid for estimat- ing the SSN (simultaneous switching noise) and the ground bounce for the high-speed digital electronics.

  The figure is an E-beam inductance measure- ment system. The E-beam inductance measurement system consists of an electron gun, a condenser lens, a current gate, deflection plates, a target, a second- ary electron detector, a vacuum chamber, a switch for the current gate, a negative voltage bias for the current gate, a high voltage anode bias for the tar- get, an amplifier for the secondary electron detec- tor, a current sensing resistor, and a current ampli- fier. The electron gun, the condenser lens, the current gate, the deflection plates, the target, and the detec- tor are placed in the vacuum chamber.

  An electron beam emitted by the electron gun, a hot cathode, is accelerated by a high voltage, 20 to 100 k\! applied between the cathode and the anode, the lead specimen. The condenser lens focuses the electron beam to a point on the target. The E beam

is pulsated by the current gate, a grid, and the switch. The more negative the gate potential becomes with respect to the cathode, t...