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Browse Prior Art Database

IMPROVED WAFER LIFT BLADE

IP.com Disclosure Number: IPCOM000007528D
Original Publication Date: 1995-Nov-01
Included in the Prior Art Database: 2002-Apr-03
Document File: 2 page(s) / 65K

Publishing Venue

Motorola

Related People

Harry Ritter: AUTHOR

Abstract

Existing SF1 lit? blades run on SS bearing guide The lift blades in use are made of a mild steel. wheels. The blades run through the wheels and then This material in this application has high inertia through the boat of wafers, lifting one up the chuck and low stiffness. Blade wobble is ever-present and for deposition. This produces particles on the Iill the blades are always bent to some degree, causing blade, which then collects a wafer for loading and difficulty in the alignment procedures. Many times comes in proximity to the wafers waiting in the boat. a less than perfect alignment is the best that can be Regular cleaning is scheduled to combat the partic- done. ulate problem, but alignment problems are often a side effect.

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Page 1 of 2

MOWVROLA Technical Developments

IMPROVED WAFER LIFT BLADE

by Harry Ritter

  Existing SF1 lit? blades run on SS bearing guide The lift blades in use are made of a mild steel. wheels. The blades run through the wheels and then This material in this application has high inertia through the boat of wafers, lifting one up the chuck and low stiffness. Blade wobble is ever-present and for deposition. This produces particles on the Iill the blades are always bent to some degree, causing blade, which then collects a wafer for loading and difficulty in the alignment procedures. Many times comes in proximity to the wafers waiting in the boat. a less than perfect alignment is the best that can be Regular cleaning is scheduled to combat the partic- done.
ulate problem, but alignment problems are often a
side effect.

Fig. 1 Old System Fig. 2 New System

0 Motorola. hc. ,995

41 November 1995

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Page 2 of 2

MolylRoLA Technical Developments

  The new system uses a carbon fiber lift blade that offers very low inertia and vev high stiffness. Blade wobble and run-out are eliminated in this application. The particulate causing wheels are also eliminated, replaced by a stock precision Unislide assembly from Velmex, Inc. The slide assembly fits over the actuating cylinder with a few adapter parts and all friction (Particulate generating) parts remain below the wafers.

  The new blade shares many measurements with the previous blade, but...