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Method for a wafer-saw clamp rotor lubricator

IP.com Disclosure Number: IPCOM000007615D
Publication Date: 2002-Apr-09
Document File: 3 page(s) / 55K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a wafer saw clamp rotor lubricator. Benefits include reduced equipment damage and improved yield.

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Method for a wafer-saw clamp rotor lubricator

 Disclosed is a method for a wafer saw clamp rotor lubricator. Benefits include reduced equipment damage and improved yield.

Background

              The conventional wafer-saw clamp rotor system is comprised of a clean, dry air supply line, a solenoid valve, and a rotor clamp assembly (see Figure 1).

              The conventional wafer-saw clamp rotor system is comprised of four pneumatic motors, a manifold, two one-way flow control valves, and 5/2-way solenoid valve (see Figure 2).

Description

              The disclosed method includes a wafer-saw clamp rotor system with the addition of a lubricator that mixes oil and air to lubricate the pneumatic rotary clamp assemblies (see Figure 3).

              The disco machine is a fully automatic dicing saw capable of cutting channels to a 6-inch or 8-inch wafer size. The wafer is supported by a nitto tape and a stainless steel film frame before the work is cut on top of the chuck table. Its assembly consists of a flat porous material, a table vacuum, and four pneumatic rotary clamps including the levers.

              These four levers lower the film frame from the chuck table during the auto-cutting process. These rotary clamp assemblies are exposed to deionized (DI) water and a soap-based solution for each wafer cut.

              The pneumatic rotor tends to stick to the clamp, which breaks the blade and damages the wafers.

              The lubricator feeds a finely metered amount of oil to the four pneumatic rotor assemblies (see Figure 4). As air flows through a nozzle, th...