Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

HEATING EFFECT ADOPTION ON DIE COATING PROCESS

IP.com Disclosure Number: IPCOM000008616D
Original Publication Date: 1998-Mar-01
Included in the Prior Art Database: 2002-Jun-27
Document File: 1 page(s) / 51K

Publishing Venue

Motorola

Related People

S.W. Kim: AUTHOR [+3]

Abstract

Silicone Coating of G-Cell(Sensing Die) is one of critical process in Accelerometer manufacturing. Silicone coating isolate the stress due to thermal mismatch between EMC(Epoxy Mold Compound) to prevent the sensitivity shifting. The full covering of die coat material is essential for device function but full coverage without overflow and coating 1st dispensing II thickness control is tough because of small flag area (base leadframe area under G-cell die).

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 84% of the total text.

Page 1 of 1

0 M

MOTOROLA Technical Developments

HEATING EFFECT ADOPTION ON DIE COATING PROCESS

by S.W. Kim, K.T. Lim and K.J. Jung

BACKGROUND

   Silicone Coating of G-Cell(Sensing Die) is one of critical process in Accelerometer manufacturing. Silicone coating isolate the stress due to thermal mismatch between EMC(Epoxy Mold Compound) to prevent the sensitivity shifting. The full covering of die coat material is essential for device function but full coverage without overflow and coating

1st dispensing II

thickness control is tough because of small flag area (base leadframe area under G-cell die).

PROBLEM DESCRIPTION

  At current manufacturing line, die coat process was defined as two steps (Figure I) for getting full coverage without overflow and coating process is very sensitive for variation of parameters.

2nd dispensing for toner

o,-,

Fig. 1

THE INVENTION

  For getting full coverage with limited flag size, material, increased the contact angle between die heating was adopted on die coat process. During coat material and leadframe. So heating during dis- dispensing, die coat material was heated by hot air pensing makes full coverage and coating thickness flow/hot plate. Heat accelerate gellation of die coat control easy. (Figure 2)

0 One

Step Dispensing

ml *

* * Heating

Fig. 2

ADVANTAGES OF THE INVENTION

  Heating makes more steep die coating angle at reduced. Only one step dispensing is enough to get the boundary and so larger amount of coating mate- full coverage by heating, ins...