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Method for the use of a sol-gel derived porous cordierite as a low-k dielectric

IP.com Disclosure Number: IPCOM000009253D
Publication Date: 2002-Aug-13
Document File: 3 page(s) / 106K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the use of a sol-gel derived porous cordierite (magnesium aluminum silicate) as a low dielectric-constant (k) dielectric. Benefits include improved performance and improved reliability.

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Method for the use of a sol-gel derived porous cordierite as a low-k dielectric

Disclosed is a method for the use of a sol-gel derived porous cordierite (magnesium aluminum silicate) as a low dielectric-constant (k) dielectric. Benefits include improved performance and improved reliability.

Background

              Interconnect crosstalk, resistance/capacitance (RC) time delay, and power consumption occur due to parasitic capacitance in dielectric layers in logic and memory chips. This problem is conventionally addressed by using a fluorine-doped silica or carbon-doped oxide (CDO) interlayer dielectric (ILD).

              For a material of a given k-value, a higher elastic modulus value results in the improved integration of that material. The elastic modulus is directly related to CMP survivability, packaging survivability and a minimization of electromigration.

              The modulus vs. the k-curve for carbon-doped oxide for a k=2.9 film is10 GPa.

              The sol-gel process is a colloidal suspension of silica particles gelled to form a solid.

General description

      The disclosed method is the use of porous cordierite as an ILD material. The cordierite is derived by the sol-gel process, which synthesizes as a porous material.

      The key element of the method is the use of sol-gel derived cordierite, which is porous and, as a result, a low-k material. This material is chosen because, for a similar density, cordierite offers the same k-value as silica but with a modulus 80% higher than silica. Additionally, cordierite can be synthesized using the sol-gel method, which enables control of the porosity and, in turn, the k-value.

              The modulus vs. k curve for cordierite is above that for the carbon-doped oxide. The theoretical modulus for a k=2.9 film is 19 GPa. For the carbon-doped oxide (CDO) process of record, the...