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Modifying Traditional Model Optical Proximity Correction (MOPC) Flow to Include Mask Writer Issues

IP.com Disclosure Number: IPCOM000009586D
Publication Date: 2002-Sep-04
Document File: 1 page(s) / 39K

Publishing Venue

The IP.com Prior Art Database

Abstract

The “Traditional” MOPC flow relies on an iterative process. This process involves taking the input data, dissecting it, permuting the dissected data, simulating the results and then iterating this process until the results of the data permutation fall within some “error budget” of the target input data. A fundamental flaw inherent in this process is that it fails to take into account downstream modifications that will be executed on the MOPC corrected data. In particular, the simulation step that happens uses as input the “ideal” mask image. Since mask writers are often not capable of producing these “ideal” figures, an error is introduced; one that could be accounted for by modifying the iteration the MOPC process performs. This error is most prevalent on non-45 degree edges.

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1. Descriptive Title

Modifying the Traditional Model Optical Proximity Correction (MOPC) Flow to Include Mask Writer Issues

2. Problem

The "Traditional" MOPC flow relies on an iterative process. This process involves taking the input data, dissecting it, permuting the dissected data, simulating the results and then iterating this process until the results of the data permutation fall within some "error budget" of the target input data. A fundamental flaw inherent in this process is that it fails to take into account downstream modifications that will be executed on the MOPC corrected data. In particular, the simulation step that happens uses as input the "ideal" mask image. Since mask writers are often not capable of producing these "ideal" figures, an error is introduced; one that could be accounted for by modifying the iteration the MOPC process performs. This error is most prevalent on non-45 degree edges

3. Solution

One approach to solve this problem is to constrain the MOPC solution such that it never creates problematic figures; this approach was the subject of a previous disclosure. Another solution, the one explored by this disclosure, is to redefine the traditional MOPC iteration such that, rather than simulating the "ideal" mask image, it simulates a more realistic view of what will appear on the mask.

Essentially what this means is that a new step needs to be inserted into the MOPC loop. Whereas the traditional flow would simulate the ideal mask image,...