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Method for oxide alignment production for a LCoS light modulator and other LC devices

IP.com Disclosure Number: IPCOM000010171D
Publication Date: 2002-Oct-30
Document File: 2 page(s) / 80K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for oxide alignment production for a liquid-crystal-on-silicon (LCoS) light modulator and other liquid crystal (LC) devices. Benefits include improved ease of manufacturing.

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Method for oxide alignment production for a LCoS light modulator and other LC devices

Disclosed is a method for oxide alignment production for a liquid-crystal-on-silicon (LCoS) light modulator and other liquid crystal (LC) devices. Benefits include improved ease of manufacturing.

Background

              LCoS with surface-perpendicular alignment provides advantages, such as a very-dark offstate, high-contrast images, and high light-throughput efficiency. It is important to have a small offstate pretilt of the LC of a few degrees off perpendicular. In conventional LCoS light modulators, the perpendicular-tilted alignment (PTA) is obtained by shallow-angle ion-beam-etching of the SiO2 surface and treating it with alcohol for a specific pretilt for a given long chain (see Figure l).

              In another case, SiOx films are deposited in a high vacuum by thermal evaporation at the angle range of 75-85 degrees on small substrates. Extreme angular range for deposition of silicon oxide films produces an oxide film with a special saw-like structure, which together with alcohol chains were the main factors in determining the pretilt. The main problem of the execution of this technique is the requirement of unusually high, nonstandard vacuum deposition equipment to provide large angles for the deposition of silicon oxide on 200-mm Si substrates. Additionally, the productivity of this method is low.

              The stability of nonorganic alignment of SiOx (and other transparent oxides) is increased with the use of alcohol bonds. This mix can be obtained from developed Si sol-gel. After a Si polymerization reaction, alcohol molecules partially...