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Metallization of Integral Heat Spreaders Through a Sputter or Evaporation Deposition Process

IP.com Disclosure Number: IPCOM000010571D
Publication Date: 2002-Dec-18
Document File: 2 page(s) / 78K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that applies a thin layer of gold to the cavity of integral heat spreader, using a sputter or evaporation deposition process. Benefits include lower manufacturing costs and improved package thermal-mechanical performance.

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Metallization of Integral Heat Spreaders Through a Sputter or Evaporation Deposition Process

Disclosed is a method that applies a thin layer of gold to the cavity of integral heat spreader, using a sputter or evaporation deposition process. Benefits include lower manufacturing costs and improved package thermal-mechanical performance.

Background

Currently, the gold can be placed on integral heat spreaders by electroplating, which is a process that has both technical and cost-related limitations.

General Description

The disclosed method applies a thin layer of gold to the cavity of the IHS, using an evaporation deposition process. Electric potentials are applied to both target and substrate (i.e. the IHS) in a sputtering chamber, to cause the simultaneous etching of and sputtering onto the substrate surface. If the substrate’s surface contains areas that have different sticking probabilities, a combination of voltages are applied to the target and substrate to achieve differing thickness of the deposited layer

Advantages

The following are advantages of the disclosed method:

·        Better control of the deposition of the gold layer.

·        Potentially lower total cost for gold plating

·        Sputtering allows greater thickness uniformity and a thinner layer of gold, which reduces raw material cost

·        Thinner gold potentially means increased throughput and possibly a faster process than electroplating.

·        Sputtering is more environmentally friendly than electroplating.

·        Precleaning ste...