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Conflict Resolution And DRC Cleaning Via Shifter/Trim Adjustment Based On Cost

IP.com Disclosure Number: IPCOM000010842D
Publication Date: 2003-Jan-24
Document File: 4 page(s) / 149K

Publishing Venue

The IP.com Prior Art Database

Abstract

The proposed solution allows for the use effective thresholds that allow the user to control the merging and cutting strategy optimally. Based on a cost function the user can decide when to merge and when to cut the shifters to ensure mask manufacturability, printability of features and conflict resolution simultaneously. The description below illustrates the use of a simple cost function the behavior followed by pictures in the next page. Further using iFlow (a flexible flow that allows the phase-shifted mask [PSM] conversion to proceed smoothly in case a phase conflict occurs. By providing different parameter sets [rule sets], you can control the aggressiveness of shifter placement performed by the tool. When a conflict occurs, the tool automatically switches to a less aggressive rule and locally [within that cell] solve the problem. This helps in the reduction in human interaction during the PSM design conversion and greatly reduces the number of errors that the user might have to handle manually. This flow is a cell based which means that if a conflict occurs within a cell, the new relaxed parameters will be used for all features within the cell.) or multi-tek (similar to iFlow by function. Main difference being that it is area based. Once a user identifies an error, the user has to define the new parameter set and manually define the areas within which the new parameters need to apply. The user will have to repeat this for each region of phase conflict by manually specifying the areas and the parameters for these areas. Different conflict cases can receive the same parameter set if appropriate, if the areas are grouped within the same layer), the user can vary the values of the threshold to take advantage of this feature to help resolve conflicts. General cost functions are a function of the shifter widths/heights, distance of separation or the DRC error and the shape of the feature.

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Page 1 of 4

1. Descriptive Title

Conflict resolution and DRC cleaning via shifter/trim adjustment based on cost


2. Problem

It is a critical problem after placement to find that shifters need to be modified to avoid mask manufacturing difficulties that occur due to minimum spacing violations. Further, a balance is required to allow for conflict resolution using these methods.


3. Solution

The proposed solution allows for the use effective thresholds that allow the user to control the merging and cutting strategy optimally. Based on a cost function the user can decide when to merge and when to cut the shifters to ensure mask manufacturability, printability of features and conflict resolution simultaneously. The description below illustrates the use of a simple cost function the behavior followed by pictures in the next page. Further using iFlow (a flexible flow that allows the phase-shifted mask [PSM] conversion to proceed smoothly in case a phase conflict occurs. By providing different parameter sets [rule sets], you can control the aggressiveness of shifter placement performed by the tool. When a conflict occurs, the tool automatically switches to a less aggressive rule and locally [within that cell] solve the problem. This helps in the reduction in human interaction during the PSM design conversion and greatly reduces the number of errors that the user might have to handle manually. This flow is a cell based which means that if a conflict occurs within a cell, the new relaxed parameters will be used for all features within the cell.) or multi-tek (similar to iFlow by function. Main difference being that it is area based. Once a user identifies an error, the user has to define the new parameter set and manually define the areas within which the new parameters need to apply. The user will have to repeat this for each region of phase conflict by manually specifying the areas and the parameters for these areas. Different conflict cases can receive the same parameter set if appropriate, if the areas are grouped within the same layer), the user can vary the values of the threshold to take advantage of this feature to help resolve conflicts. General cost functions are a function of the shifter widths/heights, distance of separation or the DRC error and the shape of the feature.

Parallel Shifter interaction: Given x < k(parallel) ( no shifter overlap) User decides k(parallel) , t and L (projection length threshold) Given whether l > L or l <= L, the user would independently for each case to choose the behavior of the feature as described below. If x < t, the user can merge shifters, if x >= t the user should be able to choose to leave it alone and leave a marker or pull back the shifters proportional to the shifter width to meet the x = k(parallel) requirement. Pull back should f...