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Method for measuring force/displacement data for an E15-type loadport

IP.com Disclosure Number: IPCOM000011508D
Publication Date: 2003-Feb-26
Document File: 2 page(s) / 125K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for measuring force/displacement data for an E15-type loadport. Benefits include improved functionality.

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Method for measuring force/displacement data for an E15-type loadport

Disclosed is a method for measuring force/displacement data for an E15-type loadport. Benefits include improved functionality.

Background

              E15.1-0999 (dated September, 1999) is a standards document from SEMI that lays out the architecture of wafer carriers and related devices for a 300-mm semiconductor manufacturing process.

              Available loadport force values are required for comparison to corresponding forces required to close and lock forward opening unified pods (FOUPs). No conventional solution exists for evaluating the loadport forces.

Description

              The disclosed method is a support plate that is compliant with SEMI standard E15.1 and related documents (see Figure 1). The overall device is located on three tooling pins known as kinematic pins. These gauge pins establish the location and orientation of the device.

              The key elements of the method include:

•             Dial indicator

•             Force gauge

•             Kinematic support plate

              Operation of the disclosed method occurs with the following steps:

1.           Advance the loadport into the forward/docked position.

2.           Set the dial indicator to zero.

3.           Advance the force gauge until indicator changes from zero.

4.           Retract the force gauge until indicator returns to zero.

5.           Open the loadport door.

6.           Advance the force gauge using shim or block of prescribed thickness (such as 5 mm).

7.           C...