Browse Prior Art Database

BACKSIDE LOADING MECHANISM FOR CONTAMINATION CONTROL

IP.com Disclosure Number: IPCOM000014022D
Original Publication Date: 1999-Oct-01
Included in the Prior Art Database: 2003-Jun-19
Document File: 1 page(s) / 26K

Publishing Venue

IBM

Related People

C NGO: AUTHOR [+5]

Abstract

Published is a design of a pallet that holds 20 substrate-carriers for use in an Ion Beam Etching system (Veeco RF-350s Microetch System). The 2-piece pallet designed for the backside loading/unloading of carriers is simple to use and can minimize particle contamination. Permanently molded elastomer to the pallet and O-ring screw holes were also used for uniform heat conducting and maintaining vacuum integrity.

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BACKSIDE LOADING MECHANISM FOR CONTAMINATION CONTROL

   Published is a design of a pallet that holds 20 substrate-carriers for use in
an Ion Beam Etching system (Veeco RF-350s Microetch System). The 2-piece pallet
designed for the backside loading/unloading of carriers is simple to use and can
minimize particle contamination. Permanently molded elastomer to the pallet and
O-ring screw holes were also used for uniform heat conducting and maintaining
vacuum integrity.

In a typical pallet design, substrates are loaded
into the pallet by sliding them into multiple
pieces of rails. The rails are then screws down
onto the base plate from the top. This design
create potential problems such as i) leaving the
substrate exposed to particle contaminants, ii)
carriers scratching the elastomer (used for heat
conducting) and shortening its life time. To
minimize these problems, a new pallet was developed
with an backside loading/unloading mechanism.
First, the many rail pieces are combined into a
single frame made of stainless steel. During
loading/unloading, the frame is placed upside down
onto a loading fixture that holds it in a fixed
position. Substrate carriers are slide upside down
into the rails of the frame using a vacuum wand.
After all carriers are loaded, the base-plate, made
of aluminum to minimize weigh and for efficient
heat conductance, is placed on top and screws down
onto the frame. To prevent leakage into the vacuum
chamber, screw holes are fitted with O-ring that
seal the base-plate aga...