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Method Allowing Easy Access to Chemical Filters

IP.com Disclosure Number: IPCOM000014218D
Original Publication Date: 2000-Aug-01
Included in the Prior Art Database: 2003-Jun-19
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Abstract

As designed today, many filter housings and their method of installation make it very difficult and time consuming to replace the filter. The interior of tools have their space filled and at times, the luxury of providing space for easy maintenance of the filters cannot be met. Due to the high costs of cleanroom space per square foot, this trend of minimizing tool footprint will accelerate. Many tools have the housing mounted above other components which do not allow easy removal of the filter from the housing. The loss of easy maintenance access therefore causes increased downtime to manufacturing and, correspondingly, an increased loss in production.

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Method Allowing Easy Access to Chemical Filters

   As designed today, many filter housings and their method of installation make
it very difficult and time consuming to replace the filter. The interior of
tools have their space filled and at times, the luxury of providing space for
easy maintenance of the filters cannot be met. Due to the high costs of
cleanroom space per square foot, this trend of minimizing tool footprint will
accelerate. Many tools have the housing mounted above other components which do
not allow easy removal of the filter from the housing. The loss of easy
maintenance access therefore causes increased downtime to manufacturing and,
correspondingly, an increased loss in production.

This method is to have the housing redesigned to allow an easy means to pivot the
housing about the tubing/piping horizontal axis, allowing the filter to be easily
and quickly changed by one person. This method will also work for housings
utilizing a different mounting method that would allow the same pivoting action
to take place. This pivoting/rotating action will allow the housing to be moved
from the vertical, out of the way of other components. This action will allow a
maintenance person to easily remove the housing, insert a new filter quickly, and
then as quickly, re-attach the housing to the head. Rotation back into place
vertically completes the filter change and the station is then ready for
operation again.

Figure 1 is an example of the housing pivoting action design.

1

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