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Corner Rounding of Mold Pattern for Plating in MEMS Fabrication

IP.com Disclosure Number: IPCOM000015174D
Original Publication Date: 2002-Apr-11
Included in the Prior Art Database: 2003-Jun-20
Document File: 2 page(s) / 81K

Publishing Venue

IBM

Abstract

Disclosed is a method to avoid the mold crack during plating in MEMS (Micro Electro Mechanical Systems) Fabrication. Plating, e.g. Ni plating, is often used for MEMS Fabrication. And the patterning the mold, e.g. PMMA, prior to plating is the most popular method for the patterned plating. If the corner of the mold pattern is sharp or perpendicular, the mold sometimes cracks from the sharp corner during plating, and it sometimes results in the pattern short or bring the difficulties to the next process. This corner rouding of mold pattern can avoid the above problem. Generally the mold pattern has the sharp corner. (see Fig.1) The mold sometimes cracks from the sharp corner during plating, and it sometimes results in the pattern short. (see Fig.2) Fig.1 The mold pattern which has the sharp corner Fig.2 The mold crack

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Corner Rounding of Mold Pattern for Plating in MEMS Fabrication

Disclosed is a method to avoid the mold crack during plating in MEMS (Micro Electro Mechanical Systems) Fabrication.

Plating, e.g. Ni plating, is often used for MEMS Fabrication. And the patterning the mold, e.g. PMMA, prior to plating is the most popular method for the patterned plating. If the corner of the mold pattern is sharp or perpendicular, the mold sometimes cracks from the sharp corner during plating, and it sometimes results in the pattern short or bring the difficulties to the next process. This corner rouding of mold pattern can avoid the above problem.

Generally the mold pattern has the sharp corner. (see Fig.1) The mold sometimes cracks from the sharp corner during plating, and it sometimes results in the pattern short. (see Fig.2)

Fig.1 The mold pattern which has the sharp corner Fig.2 The mold crack

On the other hands, when the corner of the mold pattern is rounded by rouding the pattern corner at the design level (see Fig.3), the mold does not crack during plating, and this can avoid the mold crack problem. (see Fig.4)

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Fig.3 The mold pattern which has the rounded corner Fig.4 After plating with the rounded corner

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