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Rh/Ta Cap For Lead Overlay Type GMR Heads

IP.com Disclosure Number: IPCOM000015295D
Original Publication Date: 2002-Jun-24
Included in the Prior Art Database: 2003-Jun-20
Document File: 1 page(s) / 35K

Publishing Venue

IBM

Abstract

Lead Overlay structure requires good electrical contact between the lead material and the sensor. The most common material for the sensor cap is Ta. Ta has a strong affinity for oxygen and forms TaOx at the top surface of the sensor. This TaOx formation increases contact resistance between the lead and the sensor. We disclose the use of bilayer cap of Rh/Ta metals. This allows removal of TaOx cap by e.g., RIE keeping the Rh metal intact for sensor protection. Good electrical contact between the lead and the sensor and the sensor protection are assured by use of this bilayer metal cap.

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Rh/Ta Cap For Lead Overlay Type GMR Heads

Lead Overlay structure requires good electrical contact between the lead material and the sensor. The most common material for the sensor cap is Ta. Ta has a strong affinity for oxygen and forms TaOx at the top surface of the sensor. This TaOx formation increases contact resistance between the lead and the sensor. We disclose the use of bilayer cap of Rh/Ta metals. This allows removal of TaOx cap by e.g., RIE keeping the Rh metal intact for sensor protection. Good electrical contact between the lead and the sensor and the sensor protection are assured by use of this bilayer metal cap.

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