Browse Prior Art Database

Low Cost Lapping Plate

IP.com Disclosure Number: IPCOM000015547D
Original Publication Date: 2002-Jul-10
Included in the Prior Art Database: 2003-Jun-20
Document File: 1 page(s) / 34K

Publishing Venue

IBM

Abstract

This invention uses existing materials to produce a low cost lapping plate, which can be used for a variety of machining purposes. A low cost substrate (e.g., a glass disk, an aluminum disk, etc.) is used as the lapping surface. A suspension of grinding material (e.g., fine diamond particles, fine Alumina particles, etc.) is made by mixing this material with a typical spin-on-glass, or other material, similar to that used in semiconductor manufacturing. The suspension is then applied to the disk thru the same process used to coat silicon wafers (e.g., photo resist spinner tool). The suspension is baked at the appropriate temperature to drive off the binders in the liquid and harden/densify the film. This results in an evenly dispersed grinding material bound to the substrate. Additionally, the hard bonded diamond or grinding material could enable the use of water as the coolant/lubricant; reducing other costs including disposal.

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Low Cost Lapping Plate

This invention uses existing materials to produce a low cost lapping plate, which can be used for a variety of machining purposes.

A low cost substrate (e.g., a glass disk, an aluminum disk, etc.) is used as the lapping surface. A suspension of grinding material (e.g., fine diamond particles, fine Alumina particles, etc.) is made by mixing this material with a typical spin-on-glass, or other material, similar to that used in semiconductor manufacturing.

The suspension is then applied to the disk thru the same process used to coat silicon wafers (e.g., photo resist spinner tool). The suspension is baked at the appropriate temperature to drive off the binders in the liquid and harden/densify the film. This results in an evenly dispersed grinding material bound to the substrate.

Additionally, the hard bonded diamond or grinding material could enable the use of water as the coolant/lubricant; reducing other costs including disposal.

Alternate materials which could be used in place of the spin on glass include photo resist, polyimide, etc. These materials offer some advantages by reducing the hardness of the binder, allowing the abrasive to work with different properties.

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