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Cleaning efficient FOUP based on surface with lotus effect

IP.com Disclosure Number: IPCOM000017523D
Original Publication Date: 2001-Apr-01
Included in the Prior Art Database: 2003-Jul-23
Document File: 1 page(s) / 13K

Publishing Venue

Siemens

Related People

Michael Lering: AUTHOR

Abstract

Surfaces such as known from Lotus plant have a structure similar to a toothbrush. Particles are not able to stick on because they have no good contact with this surface and can be easily rinsed away with water.

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Bauelemente

Cleaning efficient FOUP based on surface with lotus effect

Idee: Michael Lering, Bubenreuth

Surfaces such as known from Lotus plant have a structure similar to a toothbrush. Particles arenot able to stick on because they have no good contact with this surface and can be easily rinsedaway with water.

Currently available FOUPs (Front Opening Unified Pod) made of plastics material reach amaximal cleaning efficiency of 98% 0.5 µm particles or less for smaller particles. With everycleaning cycle the FOUP becomes more contaminated.

By coating the inside of a FOUP with a Lotus surface a potential decrease in contamination andtherefore an increased yield can be achieved. Another advantage is that cleaning times may bereduced leading to a faster tool throughput.

Siemens Technik Report

Jahrgang 4  Nr. 11  April 2001