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Browse Prior Art Database

Standard Components as Wafer Storage Compartments in Single Wafer Stocker

IP.com Disclosure Number: IPCOM000017806D
Original Publication Date: 2001-Oct-01
Included in the Prior Art Database: 2003-Jul-23
Document File: 1 page(s) / 164K

Publishing Venue

Siemens

Related People

Michael Lering: AUTHOR [+2]

Abstract

If it is intended to store wafers in a special storage device, for example for storing test wafers, there is the need for a wafer supporting frame. The manufac- turing of these components is a very costly process, typically done by injection moulding. Instead of producing new and application specific wafer supporting frames, there is the possibility to implement already existing components. One possible substitute is the usage of open wafer cassetes accor- ding to SEMI standard E 1.9 (see Fig. 1). A second alternative is to use wafer boats as they are typically used in hot processing equipments. In a third case, there is an option to use FOUPs as storage compart- ments within a single wafer stocker. The whole con- cept aims at a cost saving approach for using avai- lable and standardized „building blocks“ for compo- sing a single wafer storage system. It will be a costsaving option to use old wafer boats as „building block“. Used under normal temperature conditions, their surface quality and tolerances of measurements will be sufficient for the suggested application, even though they do not meet the requi- rements for hot pocessing any longer.

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Bauelemente

Standard Components as WaferStorage Compartments in SingleWafer Stocker

Idee: Michael Lering, Dresden;

Mathias Schulz, Dresden

If it is intended to store wafers in a special storagedevice, for example for storing test wafers, there isthe need for a wafer supporting frame. The manufac-turing of these components is a very costly process,typically done by injection moulding.Instead� of� producing� new� and� application specificwafer supporting frames, there is the possibility toimplement already existing components. One possiblesubstitute is the usage of open wafer cassetes accor-ding to SEMI standard E 1.9 (see Fig. 1). A secondalternative is to use wafer boats as they are typicallyused in hot processing equipments. In a third case,there is an option to use FOUPs as storage compart-ments within a single wafer stocker. The whole con-cept aims at a cost saving approach for using avai-lable and standardized „building blocks“ for compo-sing a single wafer storage system.

It will be a costsaving option to use old wafer boatsas „building block“. Used under normal temperatureconditions,� their� surface� quality� and� tolerances� ofmeasurements� will� be� sufficient� for� the suggestedapplication, even though they do not meet the requi-rements for hot pocessing any longer.

Claims:

•� � Use� of� standardized� components that providewafer� support� or� components� available on themarket for the same purpose. Examples are opencassettes,� FOUPs� or� wafer boats as in...