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Method for the use of a femtosecond laser for 9-inch C4 quartz mask repair

IP.com Disclosure Number: IPCOM000019038D
Publication Date: 2003-Aug-27
Document File: 2 page(s) / 314K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for the use of a femtosecond laser for 9-inch controlled collapse chip Connect (C4) quartz mask repair. Benefits include improved functionality.

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Method for the use of a femtosecond laser for 9-inch C4 quartz mask repair

Disclosed is a method for the use of a femtosecond laser for 9-inch controlled collapse chip Connect (C4) quartz mask repair. Benefits include improved functionality.

Background

Manual loading, cleaning cycle, and incoming wafer defects induce chrome scratches and pin-holes in the 9-inch C4 quartz mask. When these defects are present, the mask is deemed unusable because it can cause defective dice and wafers. Conventionally, the mask is scrapped and a new mask must be purchased. Replacement time is typically 14 days.

Laser pulses are used to create three-dimensional elements inside transparent material in the decoration industry.

Description

The disclosed method uses femtosecond laser pulses to create a shaded/scattered area inside a quarts mask. The shading/scattering prevents ultraviolet (UV) light from passing through defects or opens in the chrome coating in 9-inch C4 quartz masks.

         Repair can be achieved by creating large scattering/absorbing centers inside the quartz that blocks any collimated light from passing through the holes. The scattering centers are away from the chrome surface to prevent the destruction of the good chrome around the pinholes (see Figure 1).

The in-quartz scattered area over the opening in the chrome is a permanent fix that lasts for the mask lifetime. The area is not removed during cleaning cycles (see Figure 2).

The disclosed method qualifies the technology used for thr...