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©Laser-absorption Oxygen Monitor for Beam-Sealed ArF Laser System Disclosure Number: IPCOM000019562D
Publication Date: 2003-Sep-18
Document File: 1 page(s) / 21K

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Robert J. Rafac: INVENTOR


©Purpose and advantage of invention: To periodically check purge integrity of a beam-sealed laser system and optics modules without the need for an expensive oxygen monitor.

This text was extracted from a Microsoft Word document.
This is the abbreviated version, containing approximately 100% of the total text.




Active Compensation of Acoustics Induced Laser Parameters Fluctuation





B.         Purpose and advantage of invention:

Proposed method being active by nature (with feedback) can significantly reduce acoustics

related variation of laser parameters in wide range of operation conditions.


C.         Short description of invention (Include or attach appropriate sketches, and point out novel features):

Single or series of point-sources of acoustic waves (chirps), e.g. piezo transducers, mounted inside and along the chamber, composing distributed source, generate acoustic field conjugated

to the one existing in the chamber and disturbing the laser characteristics. Spectral range and algorithm of acoustic control can be determined for each particular application (chamber configuration, operating mode…)