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XLA Spatial Coherence Metrology

IP.com Disclosure Number: IPCOM000021165D
Publication Date: 2003-Dec-30
Document File: 1 page(s) / 20K

Publishing Venue

The IP.com Prior Art Database

Related People

Cymer, Inc.: OWNER

Abstract

B. Purpose and advantage of invention: To enable to measure spatial coherence of large aperture laser beam. It also enables to estimate efficiency of spatial coherence 'scrambling' introduced by the OpuS or any other means. C. Short description of invention (Include or attach appropriate sketches, and point out novel features): Two pairs of pin holes, X-Y automated scanning setup, imaging optics, PDA, computer to control, acquire and analyze data. Novel features: Scanning principle of estimation of the spatial coherence.

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This is the abbreviated version, containing approximately 100% of the total text.

2003-0094-00

TITLE:

 

XLA Spatial Coherence Metrology

B.         Purpose and advantage of invention:

To enable to measure spatial coherence of large aperture laser beam. It also enables to estimate efficiency of spatial coherence ‘scrambling’ introduced by the OpuS or any other means.

 

C.         Short description of invention (Include or attach appropriate sketches, and point out novel features):

Two pairs of pin holes, X-Y automated scanning setup, imaging optics, PDA, computer to control, acquire and analyze data.

 

Novel features: Scanning principle of estimation of the spatial coherence.