Browse Prior Art Database

CASSETTE BOAT HOLDER MODIFICATION

IP.com Disclosure Number: IPCOM000021382D
Original Publication Date: 2000-Nov-01
Included in the Prior Art Database: 2004-Jan-16
Document File: 1 page(s) / 92K

Publishing Venue

Sony Technical Digest

Related People

Douglas Czaja: INVENTOR [+3]

Abstract

This invention falls within the field of semiconductor etch technology, and is an adapter that will allow a robot arm designed to hold five inch cassette boats to hold both five inch and six inch cassette boats.

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Sony Technical Digest, Volume 3, November 2000, ISSN 1521-5180

CASSETTE BOAT HOLDER MODIFICATION

Invention by:

Douglas Czaja

Roger DeLuna, Jr.

Robert Bolanos

This invention falls within the field of semiconductor etch technology, and is an adapter that will allow a robot arm designed to hold five inch cassette boats to hold both five inch and six inch cassette boats.

A robot arm is typically used to agitate the wafer while in the etch solution in order to dislodge hydrogen bubbles that become attached to the wafers. The robot arm holds two cassettes, and the adapter has four slots where the cassettes are inserted. The pair of slots of the left side of the robot arms have a greater distance between, and this design allows the six inch cassettes to be held by the robot. In comparison, the slots on the right side of the robot arms are closer and allow five inch cassettes to be attached. Therefore, the end user has the flexibility to run either the five or six inch wafers, or both.

This adapter was developed to work with the Piranha Sink in the five inch fabrication, and it functions best when composed of polypropylene.

Sony Technical Digest, Volume 3

Page 41