Browse Prior Art Database

CHUCK CLEANING T OOL WITH ARTICULATING SURFACE

IP.com Disclosure Number: IPCOM000021394D
Original Publication Date: 2000-Nov-01
Included in the Prior Art Database: 2004-Jan-16
Document File: 2 page(s) / 376K

Publishing Venue

Sony Technical Digest

Related People

Landon Allen: INVENTOR [+3]

Abstract

This new chuck cleaning tool design integrates the cleaning tool surface area with a larger footprint, thereby creating less pressure and less friction and thus producing fewer defects. The new fixture will provide a much easier way of cleaning off photo resist, which tends to leave residue on the chuck. The new design will eliminate particles and will reduce hot spots on the chuck, which will in turn produce higher yields. The original fixture is a fixed tool that causes abrading and particle accumulation on the clean wipe. If not cleaned up properly, the particles will lay on the chuck and become embedded into the wafers.

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Sony Technical Digest, Volume 3, November 2000, ISSN 1521-5180

CHUCK CLEANING T OOL WITH ARTICULATING SURFACE

Invention by: Landon Allen

Roger De Luna, Jr.

Douglas A. Czaja

This new chuck cleaning tool design integrates the cleaning tool surface area with a larger footprint, thereby creating less pressure and less friction and thus producing fewer defects. The new fixture will provide a much easier way of cleaning off photo resist, which tends to leave residue on the chuck. The new design will eliminate particles and will reduce hot spots on the chuck, which will in turn produce higher yields. The original fixture is a fixed tool that causes abrading and particle accumulation on the clean wipe. If not cleaned up properly, the particles will lay on the chuck and become embedded into the wafers.

The prototype is made of Delrin (AF) plastics for economy and machinabilty. The Delrin plastic is very durable and will adhere to long repeated product runs. The chuck was manufactured from two inch Delrin.

Page 56,

Sony Technical Digest, Volume 3

Page 57, Sony Technical Digest, Volume 3