Browse Prior Art Database

POLYETHYLENE RF COIL COVER

IP.com Disclosure Number: IPCOM000021395D
Original Publication Date: 2000-Nov-01
Included in the Prior Art Database: 2004-Jan-16
Document File: 2 page(s) / 172K

Publishing Venue

Sony Technical Digest

Related People

Raul Sanchez: INVENTOR

Abstract

RF coils heat a graphite susceptor on which silicon wafers are placed, with the heating of the graphite susceptor being accomplished through induction. The distance between the RF coils and the graphite susceptor is critical, which is in turn important to the doped epitaxial film deposited on the silicon wafers. A variance of one-sixteenth of an inch in the distance between the coils and susceptor can make a large difference in the temperature profile across the susceptor, and this greatly affects wafer to wafer resistivity uniformity.

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Sony Technical Digest, Volume 3, November 2000, ISSN 1521-5180

POLYETHYLENE RF COIL COVER

Invention by: Raul Sanchez

RF coils heat a graphite susceptor on which silicon wafers are placed, with the heating of the graphite susceptor being accomplished through induction. The distance between the RF coils and the graphite susceptor is critical, which is in turn important to the doped epitaxial film deposited on the silicon wafers. A variance of one-sixteenth of an inch in the distance between the coils and susceptor can make a large difference in the temperature profile across the susceptor, and this greatly affects wafer to wafer resistivity uniformity.

One common problem encountered is that RF coils made of copper are usually bent during preventative maintenance. This causes the induced heat to vary across the susceptor, which then causes resistivity variance across the wafers on the susceptor. The cover and the center support of this invention are made of polyethylene. The protective cover including center support should be placed over the RF coils prior to starting the reactor area preventative maintenance. Placing the polyethylene covers over the RF coils before preventative maintenance will prevent the bending of the coils during that process.

Page 58

Sony Technical Digest, Volume 3