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Method for strain relief on a DC power cable

IP.com Disclosure Number: IPCOM000021718D
Publication Date: 2004-Feb-04
Document File: 3 page(s) / 460K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for strain relief on a direct current (DC) power cable. Benefits include improved functionality and improved cost effectiveness.

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Method for strain relief on a DC power cable

Disclosed is a method for strain relief on a direct current (DC) power cable. Benefits include improved functionality and improved cost effectiveness.

Background

         Several incidents of electrical arcs have been observed during semiconductor manufacturing coming from the shorting switch housing of a manufacturing tool. The root cause of the majority of these instances is long-term strain placed on the cable as the chamber cover is opened and closed during scheduled maintenance and/or troubleshooting. This strain results in the insulation around the center conductor being pulled back from the connector, leaving it exposed. The cable is coaxial, so the ground is in close proximity to the center conductor. When the conductor is exposed, a path to ground is provided and a fire can result (see Figure 1).

         A low-cost strain-relief device is required to prevent cable wear and possible unsafe conditions.

Description

The disclosed method is a strain relief device that holds stationary the connection point of the DC power cable to a deposition chamber. The pivot point on the cable is moved back to where the cable is held by the strain relief device, eliminating the strain on the connection point.

         The method includes a block of nonconductive material comprised of four separate pieces held together by hex-head screws. The two larger pieces are 6.9 cm x 4.7 cm x 2.5 cm. These pieces are used to mount the device on the tool. The other two pieces secure the power cable. The dimensions are 4.7 cm x 1.25 cm x 4.4 cm and 4.7cm x 1.25 cm x 2...