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Method for controlling air voiding during flat, hard press imprinting

IP.com Disclosure Number: IPCOM000022662D
Publication Date: 2004-Mar-24
Document File: 3 page(s) / 70K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for controlling air voiding during flat, hard press imprinting. Benefits include improved functionality and improved performance.

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Method for controlling air voiding during flat, hard press imprinting

Disclosed is a method for controlling air voiding during flat, hard press imprinting. Benefits include improved functionality and improved performance.

Background

         Entrapped air during the imprinting process conventionally creates disruptive voids within the dielectric being imprinted. Air can be trapped within the cavities of the microtool and sealed off using the soft dielectric as a gasket. As a result, the trapped air is not evacuated during the vacuum pump down.

         Conventional solutions complete the press process in a vacuum chamber with the lay-up stack assembled with full contact. Depending on the actual tooling and the mass of the press plates, small to significant amounts of air could be trapped during the air evacuation process step (see Figure 1).

General description

The disclosed method controls air voiding during imprinting in flat, hard press applications by using standoffs to hold the press plates and tooling apart during the vacuum air evacuation step of the process. The standoffs collapse during the pressure step in the process, enabling the imprint to occur.

Advantages

         The disclosed method provides advantages, including:

•         Improved functionality due to ensuring total and complete air evacuation from the press vacuum chamber

•         Improved performance due to preventing the formation of voids within the dielectric

Detailed description

The disclosed method holds the press plates and tooling apa...