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THIN FILM INTERFACE FOR PASSIVATION AND BONDING

IP.com Disclosure Number: IPCOM000025024D
Original Publication Date: 1983-Apr-30
Included in the Prior Art Database: 2004-Apr-04
Document File: 2 page(s) / 63K

Publishing Venue

Xerox Disclosure Journal

Abstract

Two problems exist with prior art optical disks: (a) oxidation of the media and (b) disk radial runout. Thin films of Si02 or Al2O3 deposited over tellurium (Te), the writing medium, will eliminate both problems.

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IEROX DISCLOSURE JOURNAL

THIN FILM INTERFACE FOR PASSIVATION AND BONDING Roberta M. Fay
Richard D. Weir

Proposed Classification
U.S. CI. 3651126 Int. C1. Gllc 11/46

Two problems exist with prior art optical disks: (a) oxidation of the media and (b) disk radial runout. Thin films of Si02 or Al2O3 deposited over tellurium (Te), the writing medium, will eliminate both problems.

During the Si02 deposition, ZX~O-~ torr oxygen gas was bled into a bell jar. After the laser writing process, the samples were inspected with an optical microscope and a scanning electron microscope (SEM). The Si02 coating was transparent so the hole patterns could be discerned under a low magnification optical microscope. These hole patterns appear "typical" of those on bare Te coated substrates. Initial evaluation under the SEM showed no breaks or deformations in the Si02 surface. At very high magnification (lOOOX) and large tilt angles (45') the fidicials and hole patterns could be detected. The "holes" are actually raised areas because the shadowing affects the "holest1 exactly the same as adjacent dust particles that are clearly raised above the surface.

Close inspection of the patterns show uniformity and no discernable break in the top layer above the "holef1. The oblong shapes are due to the tilt angle of the bombarding electron beam in relation to the sample. (The image formed on the cathode ray tube actually comes from secondary electrons emitted by the sample while the electron bea...