Browse Prior Art Database

PHOTOLITHOGRAPHICALLY FABRICATED GLASS WAVEGUIDES

IP.com Disclosure Number: IPCOM000025253D
Original Publication Date: 1984-Apr-30
Included in the Prior Art Database: 2004-Apr-04
Document File: 2 page(s) / 77K

Publishing Venue

Xerox Disclosure Journal

Abstract

For certain applications, it is both necessary to have waveguide arrays that can be precisely positioned and be nonvolatile in an evacuated space. For this it is apparent that neither free standing glass fibers nor organic planar guides will serve the intended purpose. A solution is disclosed herein that comprises a method for producing planar waveguide arrays from glass.

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XEROX DISCLOSURE JOURNAL

PHOTOLITHOGRAPHICALLY FABRICATED Proposed Classification GLASS WAVEGUIDES US. CI. 333/1
Joel M. Pollack Int. CI. HOlp 5/00

LOW INDEX GLASS

 HIGH INDEX
VITREOUS FRIT

NICKEL

I /

BRASS

GUIDES PRIOR TO PART/NG g ENGIPSULAT/ON

For certain applications, it is both necessary to have waveguide arrays that can be precisely positioned and be nonvolatile in an evacuated space. For this it is apparent that neither free standing glass fibers nor organic planar guides will serve the intended purpose. A solution is disclosed herein that comprises a method for producing planar waveguide arrays from glass.

Methods for producing glass channels utilizing etching procedures have two prerequisites. First is the need for isotropic etching of the glass. Secondly, that the glass be etched to a smooth surface. The present technique utilizes the known uniformity of electrodeposition and the ability to faithfully conform to this structure to produce superior guides that do not scatter light excessively. Rre- cision of placement can match that of the photolithography.

123 Volume 9 Number 2 March/April 1984

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PHOTOLITHOGRAPHICALLY FABRICATED GLASS WAVEGUIDES (Cont'd)

This process can be easily understood with reference to the attached figure and begins with the generation of a precision art work master. This is used in turn to image resist deposited upon a very smooth layer of brass. Once developed the...