Browse Prior Art Database

SOLID STATE LED WRITE BAR ON SILICON

IP.com Disclosure Number: IPCOM000025580D
Original Publication Date: 1986-Jun-30
Included in the Prior Art Database: 2004-Apr-04
Document File: 2 page(s) / 96K

Publishing Venue

Xerox Disclosure Journal

Abstract

The concept presented here is to a process for fabricating a solid state full width write bar composed of an array of Light Emitting Diodes (LEDs). The process is based on the goad lattice match and experimentally proven ability to grow epitaxial device quality Gallium Phosphide (Cap) on sllicon.

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XEROX DISCLOSURE JOURNAL

SOLID STATE LED WRITE BAR ON SILICON
Joseph J Daniele
Mehdi N Araghi

Proposed Classification U S CI. 29/569 OOL Int. C1. HOll21/00

The concept presented here is to a process for fabricating a solid state full width write bar composed of an array of Light Emitting Diodes (LEDs). The process is based on the goad lattice match and experimentally proven ability to grow epitaxial device quality Gallium Phosphide (Cap) on sllicon.

The process for fabricating silicon monolithic or mosaic full width arrays comprises the following steps:

1 Coat a 3-4" Silicon (Si) wafer with Silicon dioxide (S102) or similar thin film layer

Open holes of appropriate size and spacing for good pixel match (e g. 30 p diameter, 100 p pitch) by photolithography Subse- quently grow Gap LED structures including a p-n junction and a contacting layer in these islands by selective epitaxy(2) Several gowth techniques such as MBE, LPE & CVD are usable but CVD is probably best suited to large areas and good uniformity

Process the wafer using standard Large Scale Integration (LSI) techniques (with a modified process, as necessary), make contact to LEDs (transparent) and also simultaneously fabricate LED drive circuits and other electronics such as compressors, decoders, fan- outs, ete , on the remaining silicon real estate.

The completed array may then be mounted and driven in the desired optical and mechanical configurations, with emphasis on high effkiency optics due to the l...