Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

MICRO MECHANICAL LINE SCANNER

IP.com Disclosure Number: IPCOM000025593D
Original Publication Date: 1986-Jun-30
Included in the Prior Art Database: 2004-Apr-04
Document File: 6 page(s) / 203K

Publishing Venue

Xerox Disclosure Journal

Abstract

In electro-mechanical modulators 2 of the type shown in Figure 1, silicon dioxide membranes or fingers 3 are fabricated on silicon wafers 4 and arranged in a linear array so that each finger 3 can be deflected through the application of an electrostatic force. The exterior surface of each finger 3 is coated with a suitable reflecbve material such as chromium to provide a mirrored surface 5 The highly reflective fingers 3 serve as small mirrors which reflect beams of light 6 impinged thereon in a specullar manner along an optical path 7 By selectively deflecting the fingers andividually in accordance with an image signal input, the beams of light 6 are deflected along a second optical path 8 The light emitted by the modulator along one of the paths, as for example path 7, is collected and focused onto a recording member 9 (seen in Figure 5) to provide an image representative of the image signal input.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 55% of the total text.

Page 1 of 6

XEROX DISCLOSURE JOURNAL

MICROMECHANICALLINE SCANNER ProposedClassificatiora Joachirn A Ritter U S C1.3581200

Int. C1. H04n 3/02

Volume 11 Number 3 May/June 1986 145

[This page contains 1 picture or other non-text object]

Page 2 of 6

MICRO MECHANICAL LINE SCANNER (Cont'd)

XEROX 146 DISCLOSURE JOURNAL

Volume If Number 3 May/June 1986

[This page contains 1 picture or other non-text object]

Page 3 of 6

MICRO MECHANICAL L&euroNE SCANNER (Cont'd)

XEROX DISCLOSURE JOURNAL

Volume If Number 3 May/June 1986

[This page contains 1 picture or other non-text object]

Page 4 of 6

MICRO MECHANICAL LINE SCANNER (Cont'd)

In electro-mechanical modulators 2 of the type shown in Figure 1, silicon dioxide membranes or fingers 3 are fabricated on silicon wafers 4 and arranged in a linear array so that each finger 3 can be deflected through the application of an electrostatic force. The exterior surface of each finger 3 is coated with a suitable reflecbve material such as chromium to provide a mirrored surface 5 The highly reflective fingers 3 serve as small mirrors which reflect beams of light 6 impinged thereon in a specullar manner along an optical path 7 By selectively deflecting the fingers andividually in
accordance with an image signal input, the beams of light 6 are deflected along a second optical path 8 The light emitted by the modulator along one of the paths, as for example path 7, is collected and focused onto a recording member 9 (seen in Figure 5) to provide an image representative of the image signal input.

Although the reflective fingers 3 are specularly reflective, the fingers do not reflect images or irnagmg light beams Instead, the fingers 3 act as small windows through which light is admitted into the entrance pupil of a lens which in turn images these small windows as spots of light onto the recording member 9

The problem IS to direct sufficient light through the small window and into the entrance pupil of the lens to make images on the recording member

In scanners using modulators of the above-described type, a fiber illuminator having a single row of optical fibers is used as the light source However, at 1s

difficult to arrange the optical fibers accurately and uniformly and further there are often very large deviations of fiber to fiber location and dead fibers.

Referring to Figure 2, it is proposed that a fiber ilIurninator 10 having multiple rows (i-eb 4, 6, 8, or more sows) of ultra small fibers 12 be used to illuminate a precision slat aperture 13. Aperture 13 may be produced photographically on a glass substrate or by chemical milling or laser cutting techniques using a suitable metal or plastic substrate or by vaplous other methods to the most exacting specifications at low cost. As a result, any point in the aperture slit 14 is now illuminated from a finite distance by multi-row fiber illuminator 10 Absolute alignment of the aperture slit 14 with respect to the illuminating fibers 12 is not required since the...