Browse Prior Art Database

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY + TOTAL INTERNAL REFLECTION

IP.com Disclosure Number: IPCOM000025600D
Original Publication Date: 1986-Aug-31
Included in the Prior Art Database: 2004-Apr-04
Document File: 8 page(s) / 343K

Publishing Venue

Xerox Disclosure Journal

Abstract

Referring to Figure la, a microdeflector is a thin (typically <0.5 micron), flexible, cantilevered finger 4 of silicon dioxide on a silicon substrate 5 The cantilevered finger 4 is formed by anisotropically etching the silrcon from beneath the silicon oxide using EDP (ethylene diamine pyrocatechol and water). The extent of the etch in the lateral direction is determined by the large etch ratio between and el11 > planes of silicon and the depth of the well is controlled by the inability of EDP to etch silicon heavily doped with boron. The top surface of the finger 4 is covered with a layer of gold (Au)

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 29% of the total text.

Page 1 of 8

LEROX DISCLOSURE JOURNAL

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY + TOTAL INTERNAL REFLECTION Christopher Snelling
Robert W. Gundlach
Martin
E. Banton

Proposed Classification U S. C1.350/360
%rat. C1. G02b 26/00

I

Volume 11 Number 4 July/August I986 16 9

5\

[This page contains 1 picture or other non-text object]

Page 2 of 8

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY 9 TOTAL
INTERNAL REFLECTION (Cont'd)

170

7

2/' a22

  XEROX DISCLOSURE JOURNAL Volume 11 Number 4 July/August 1986

[This page contains 1 picture or other non-text object]

Page 3 of 8

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY + TOTAL

INTERNAL REFLECTION (Cont'd)

J

I

 I I4
5

I

3c

  XEROX DISCLOSURE JOURNAL Volume 11 Number 4 July/August I986 171

I

1

I

4)

[This page contains 1 picture or other non-text object]

Page 4 of 8

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY + TOTAL INTERNAL REFLECTION (Cont'd)

1-72

' 3'

  XEROX DISCLOSURE JOURNAL Volume 13. Number 4 July/Aupst 1986

[This page contains 1 picture or other non-text object]

Page 5 of 8

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY -+ TOTAL INTERNAL REFLECTION (Cont'd)

FIG. 6

27OC S102 ATTACMED SI (METALLIZATION PERFORMED AT THIS STAGE

1-1 27OC SlO2 FREED FROM SI

THIS WOULD BE STATE IF NO METALLIZATION PRESENT

SI'

27.C STIFFNESS OFCHH3MltlM MEN BENDS SIQ2 BACK AMCUNT OF BENDING DEPENDS ON GROWTH I OEWSlTION TEMP OF Sl02

SI

'

  XEROX DISCLOSURE JOURNAL Volume I1 Number 4 July/August 1986 173

[This page contains 1 picture or other non-text object]

Page 6 of 8

A PRINT BAR UTILIZING A SILICON MICRODEFLECTOR ARRAY -+ TOTAL
INTERNAL REFLECTION (Cont'd)

Referring to Figure la, a microdeflector is a thin (typically <0.5 micron), flexible, cantilevered finger 4 of silicon dioxide on a silicon substrate 5 The cantilevered finger 4 is formed by anisotropically etching the silrcon from beneath the silicon oxide using EDP (ethylene diamine pyrocatechol and water). The extent of the etch in the lateral direction is determined by the large etch ratio between <loo> and el11 > planes of silicon and the depth of the well is controlled by the inability of EDP to etch silicon heavily doped with boron. The top surface of the finger 4 is covered with a layer of gold (Au)

OF chromium (CP) forming a top electrode 8. Application of a voltage between top electrode 8 and the silicon substrate 5 results in deflection of the finger 4 as shown in Figure lb.

Referring to Figure 2, a linear array of fingers 4, referred to as a microdeflector array 3, could be used to frustrate Total Internal Reflection (TIR) in response to an image signal input and thereby produce a pattern of on/off pixels. For this, the microdeflector array 4 is disposed in close proximity to the surface 7 of a prism 6. A voltage applied between the surface 7 of prism 6 and selected fingers 4 of the microdeflector array 3 attracts those fingers to the surface of the prism 6. A dielectric film 10 on the surface of fingers 4
serves to frustrate...